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Solid State Technology Resource GuideCompany Profile Innovative Robotics
Description: Produces low COO, ISO Class1 atmospheric wafer handling, SCARA Robots. The IR-820 offers trackless 3-FOUP reach. Blended Motion Trajectory provided high throughput. No or low preventative maintenance required. Optional fifth axis degree flipper, dual-wrist, external track, pre-aligners and sorter /EFEM available. Offers emulation for drop-in replacement. Tool customization welcomed. Product CategoriesThis company appears in the following product categories: |
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