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Solid State Technology Resource Guide

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Company Profile

Hitachi High Technologies America

Semiconductor Equipment Div

1375 N 28th Ave
PO Box 612208
Dallas, TX 75261

Phone: 877-327-3824
Fax: 972-615-9300
URL: www.hitachi-hta.com
Email: etch.sales@hitachi-hta.com
Year Founded: 2001
Number of Employees: 200

Description: Designs and manufactures plasma etch tools using a high-density, low-pressure ECR plasma source suited for advanced nano-gates, critical STI structures, and other crucial materials. Also offers electrically heated catalytic abatement tools for the complete destruction of PFC gases used in the SC industry.

Product Categories

This company appears in the following product categories:

Manufacturers' Products
- Chemicals/Gases/Materials: Handling and Control
  - Contamination Control
    - Abatement Systems
      - Gases
- Fab/Process Technology and Equipment
  - Fabrication/Process Technology
    - Etch
      - Etching equipment/accessories
    - Etch, Dry Systems/Accessories
      - Single wafer

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