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Solid State Technology Resource Guide

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Company Profile

Carl Zeiss SMT AG

Semiconductor Metrology Systems Div
Carl-Zeiss-Promenade 10
Jena D-07745
Germany
Phone: 49-3641-64-2563
Fax: 49-3641-64-2938
URL: www.smt.zeiss.com/sms
Email: info-sms@smt.zeiss.com
Year Founded: 1993
Number of Employees: 120
Key Personnel: Pres: Frank Averdung
Description: Offers photomask qualification and repair solutions. The optical mask inspection system AIMST analyzes the printability of mask defects, Phame® measures the phase shift of PSMs with high resolution and complementary MeRIT® MG allows for precise e-beam mask repair.

Offices

Carl Zeiss SMT Inc
Thornwood, NY
PH: 916-747-7700
Carl Zeiss SMT Ltd
Cambridge
UK
PH: 44-131-315-0422

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