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Solid State Technology Resource GuideCompany Profile Oxford Instruments
Key Personnel: Mktg Comms Exec:
Jacqueline Cooper Description: Supplies plasma-enhanced deposition and etch (PECVD, RIE, ICP), ion beam deposition and etch, atomic layer deposition, sputtering, and MBE processing equipment. Products range from stand-alone systems for R&D through batch tools and to clustered cassette-to-cassette platforms for high-throughput production processing, supported by a dedicated applications laboratory. Product CategoriesThis company appears in the following product categories: |
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