Key Personnel: Sls/Mktg Dir: Donald A. Pearson II

Description: Provides OEM and optical metrology needs. Products include interferometers (from classical to vibration-insensitive technology), wavefront sensors, and scatterometers. Also provides instrument-independent interferometry software with embedded vibration-insensitive features, interferometry accessories, training, interferometer upgrades, and measurement services. Products are used in shop floors as well as R&D laboratory environments.